C07800 - SEMI C78 - Test Method for Determining Roughness of Polymer Surfaces Used in Ultrapure Water and Liquid Chemical Distribution Systems by Atomic Force Microscopy StdTpc-Process Chemicals - Precursors FPD基板のエッジの様々な外観を定義し,その関係を述べている。本文書は他のSEMI FPD文書に述べられている用語の存在を仮定している。本文書は厚み仕様の公称値が1
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